(3) Cooperating with the technological innovation of the information industry and production science In order to find a living space in an open environment, there is no way out without independent innovation technology. Therefore, some projects should be selected according to the principle of patent, technical content and market. According to the current development status, products needed in the fields of information, life medicine, environmental protection, agriculture, etc. should be given priority support. Such as precision instrumentation for interventional therapy in medicine, super-resolution lithography and cleaning methods and mechanism studies in the electronics industry. 
2. Priority areas In the early stages of basic research, it is difficult to predict whether there will be breakthroughs. However, when breakthroughs have been made, there is a need for a conversion mechanism to enter the market.
(1) Nano-tracking technology and systems.
(2) Coordinate tracking measurement system for interventional installation and manufacture.
Key theories and techniques: super hemispherical reflectors (n=2 or innovative in the field), fast, multi-channel interferometers (frequency difference 3 to 5 megabytes), two-dimensional precision tracking angle measurement system (0.2′′ to 0.5′′), General purpose signal processing system (operating frequency 5 megabytes), railless semiconductor laser measuring system (resolution 1 μm), thermal deformation simulation, force deformation simulation.
These contents are not limited to one technical solution, but are common to several different technical solutions. If the trackless interferometer is used, the requirements of the tracking system can be reduced; the two-dimensional precision tracking angle measuring system can obtain high precision in the 1M3 measuring range; the super hemispherical mirror can improve the accuracy of the 4-way tracking scheme. Intervening in the field of manufacturing and assembly can't wait for a long time. Compensation for force and thermal deformation is necessary and needs to be fast enough. There is still a considerable gap in the current technology, so these developments are critical.
Applications: Identification of new parallel mechanism machine tools, identification of aircraft assembly frames, installation of large equipment, calibration of biochip precision robots, etc.
(3) Non-contact probes and various scanning probe microscopes The aerospace industry has put forward urgent requirements for this, which is the key technology for the development of coordinate measuring machines in the future. At present, the contact probe has been completely monopolized by foreign countries, and the non-contact probe has not yet matured. We have the opportunity to participate in competition. The principle of laser triangulation, which was used in the past, is subject to many restrictions, and it is difficult to make breakthroughs, but it can work hard on principle innovation. Should break through the resolution of 0.1 ~ 0.5μm.
(4) Standardization, modularization, compatibility and integration of computer-aided measurement theory signal processing systems. For example, most of the current ISA bus, IEEE 488 port, the computer may cancel the ISA bus in the future, the USB interface for notebook computers will be widely used. In the past, the instruments produced in China were satisfied with digital display, and there was no data exchange interface, making it difficult to enter the international market. Instruments produced abroad are generally equipped with IEEE488 (GPIB) ports. RS232: The high performance standards that are currently available as alternatives are USB, IEEE 1394 and VXI. This turning point provides us with an opportunity. At present, the working frequency band of virtual instruments is on the order of kilohertz, which is too low for interference signal processing. It can be combined and complemented to form a series of modules, while reducing costs and improving the efficiency of R&D work as a whole. Based on the existing foundation, the development of specialties is conducive to overcoming repeated research.
(5) New devices, new materials In the past, scientific research evaluation systems were biased towards the whole machine and system, ignoring the trend of materials and devices. New breakthroughs may occur in new light sources and new high-frequency detectors. At present, the response frequency of the detector is only 10 to the power of 9 and the optical frequency is up to 10 to the 14th power. At present, the interferometer actually acts as a mixer, adapting to the shortage of the detector (if the response of the detector is really good) Exceeding the optical frequency, the interferometer is useless). If the performance of the detector is significantly improved, it is a big breakthrough for communication.
(6) Research and innovation of semiconductor laser metrology characteristics Semiconductor lasers need to solve many problems (such as line width, calibration, frequency conversion, etc.). But if many problems are solved, semiconductor laser systems are more complex than gas laser systems and will not be competitive. Some problems are not completely solved at the physical level. For example, if a semiconductor laser can form a dual frequency, it is undoubtedly a very important feature. If it can sweep both frequency and two similar frequency, it will become a new trackless measurement tool.
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