Technology and Application of Oilless Vortex Vacuum Pump

The early 90s of last century, the world's first scroll vacuum pump to market, scroll technology began as a new type of vacuum access technology is being promoted around the world. Oil-free vortex vacuum pump scroll is one end connected to a plane with one or several involute spiral form a scroll-like disc structure. A pair of scrolls consisting of a fixed scroll and an orbiting scroll form the basic pumping unit of an oilless scroll vacuum pump. Orbiting scroll driven by the eccentric shaft and the relative motion of the fixed scroll to make a relative volume of the crescent-shaped vacuum chamber so that gas inhalation from the suction port, the exhaust port discharge to complete the suction, compression, exhaust cycle. Compared with other types of oil-free vacuum pump oil-free scroll vacuum pump has the following characteristics: ① no oil, no friction --- non-contact, no wear and tear, does not produce particulate dust pollution, access to clean vacuum; Large --- double-scroll structure and single-stage pump diameter compared to the same size 2 times the energy saving; ③. Pumping efficiency --- with 3-4 pumping unit, the pressure is small; The atmosphere and the vacuum by the 0 ring seal, low leakage; ④ non-contact, good balance, the impact of torque is small, low noise, small vibration; ⑤ simple and compact structure, the same size, small radius of motion, stable operation; Small size, easy maintenance, low maintenance costs; ⑦. Air-cooled, without water cooling. The scroll vacuum pump is mainly used in the following areas: ① semiconductor industry - thin film preparation equipment, semiconductor device packaging equipment; ② Scientific Instruments Industry - Synchrotron radiation beam line, electron microscope, analysis and testing equipment; ③ Machinery and Equipment Industry - Materials Preparation equipment, vacuum testing, material purification equipment; ④ chemical industry; ⑤ medical equipment - dental equipment, dialysis machines, biological products and pharmaceutical preparation; ⑥ packaging industry - food, pharmaceuticals, biological products and other packaging equipment. The vortex vacuum pump to the user to solve the vacuum system pollution and vibration and other basic, common problems, and make the system lower manufacturing and operating costs. Therefore, the rapid expansion in foreign markets, only a Japanese company's products in China in the last three years, sales increased 10 times. Is a can not be ignored technology and products. This paper summarizes the technology development and application of oil-free vortex vacuum pump, including the working principle, manufacturing process, technical indicators, characteristics, basic purposes and practical application methods from the development of vortex technology to the oil-free vortex vacuum pump; Vortex vacuum pump technology has a systematic introduction.

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